Analytics
Analytics inside the clean room
- Microscope Nikon ME600
- CMT-SR2000N-R 4-point Sheet resistivity mapping
- TLM-setup for the measurement of contact resistance
- M-Line-Spectroscopy Metricon
- Filmetrics F20-UV - Thin-Film measurement system
- Needle prober Cascade
- Needle prober Süss
- Particle microscope Leica
- Stylus profilometer KLA-Tencor P-17
Vacuum analytics
- Various test setups for system testing under vacuum conditions (e.g. outgassing tests)
- Various pressure measuring cells
- Prism QMS 200 mass spectrometer
Surface and material characterization
The following tools for surface and material characterization are shared with the materials engineering team.
- Scanning electron microscope (SEM) LEO 1455 VP (incl. EDX)
- Atomic force microscope (AFM) DI Dimension 3100
- White light interferometer / confocal profilometer PLµ2300
- X-ray diffractometer PANalytical X'Pert PRO MRD-XL
- Fluorescence microscope
- Shear tester and micro chevron tests
Specific test setups
For a comprehensive characterization of our devices we build project-specific test setups.
- Shear tester and micro chevron tests
- Equipment for the characterization of fluidic components
- Pressure controller Fluigent (1000 mbar und 345 mbar)
- Syringe pumps
- Various flow meters (3.7 nl/min to 1 ml/min)
- Various small parts (valves, bubble traps, adapters and connectors)
Contact
Dietmar BertschIMP Institut für Mikrotechnik und PhotonikSenior Research Engineer, Fachverantwortlicher Packaging
+41 58 257 34 71dietmar.bertsch@ost.ch