Microsystems and Sensors

Piezoresistive sensors are used in measuring force, displacement, pressure and strain. In this case, a piezoresistive sensor was integrated into a cantilever, in order to measure force and displacement. 

Silicon thermal actuators, fabricated through microtechnology, are exceptionally well suited for in-plane movements. Depending on the geometry and the maximum allowed temperature, deflections in up to 40 μm and forces of a few mN can be reached. 

Thermoelectric generators (TEGs) convert heat into electrical energy. A good example of their application is as power sources for sensors in difficult-to-reach locations. They consist of many thermoelements  connected in series.

Microfluidic mixers are employed for mixing liquids, for example in the pharma-industry. Compared to conventional methods, microfluidic mixers show up to 90% dead volume reduction.

Further information on our competences in Microfluidics and Medtech

Whether you want to miniaturize an existing system or find alternative solutions , we accompany you from idea to prototype to small series production. Microtechnology allows the fabrication of micrometer-sized structures, with tolarences of a few hundred nanometers. The so reached precision is very high compared to conventional mechanical manufacturing processes. Additionally to the technical design and fabrication of sensors and actuators, transducers and system integration are important aspects in the development of micro-electro-mechanical systems (MEMS).  Thus we are committed to an interdisciplinary approach to microsystems technology, leading to industry compatible and product oriented solutions.