Coating technologies

Thin Films

  • PVD Sputtertool BAS 450
  • PVD Sputtertool G&S 550
  • PVD Sputtertool Radiance SPM
  • PVD Evaporationtool BAK 600
  • PECVD Oxford Instruments Plasmalab 100

Electroplating

  • Rackplater RENA EPM 100R
  • Tilt-Rotation-Plater RENA EPM 100T
  • Fountain-Plater RENA EPM 100F
  • Various bath for wet chemical pretreatments

Contact

IMP Institut für Mikrotechnik und PhotonikLeiter Reinraum

+41 58 257 34 57marco.cucinelli@ost.ch